Electron transport coefficients in CF4 magnetized plasma discharges

Abstract

Electron transport coefficients for electron swarms in carbon tetrafluoride (CF4) in the presence of uniform static electric and magnetic fields crossed at arbitrary angles to each other are calculated using a Monte Carlo simulation technique. We focus on the way in which the transport coefficients are influenced by electric and magnetic field strengths and the angle between the fields. The investigation has resulted in a database of transport data which is applicable for a wide range of potential applications, although we focused upon the provision and correct implementation of swarm data within the fluid modeling of a magnetron or inductively coupled plasma discharges.