Measurements of conductivity of thin gold films at microwave frequencies employing resonant techniques
Zychowicz, Tomasz, Krupka, Jerzy, and Mazierska, Janina (2006) Measurements of conductivity of thin gold films at microwave frequencies employing resonant techniques. Proceedings of Asia-Pacific Microwave Conference 2006. APMC 2006 Asia Pacific Microwave Conference 2006 , 12-15 December 2006, Yokohama, Japan , pp. 572-574.
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Quasi TEol1 mode cavity and split post dielectric resonator have been used to measure resistivity of very thin gold films deposited on single crystal quartz substrates. It has been found that a sharp transition of electrical properties takes place for films of thickness between from 4.5 nm and 8 nm. For the films thicker than 8 nm the resistivity was comparable to that of bulk materials, and its dependence on film thickness could be described by known theoretical models, while for films thinner than 4.5 nm the resistivity was few orders of magnitude larger. Presented techniques allow measurements of resistivity of thin films in the eight decades range.
|Item Type:||Conference Item (Refereed Research Paper - E1)|
|Keywords:||thin metal films; conductivity; resonant techniques|
|FoR Codes:||10 TECHNOLOGY > 1005 Communications Technologies > 100505 Microwave and Millimetrewave Theory and Technology @ 100%|
|SEO Codes:||86 MANUFACTURING > 8617 Communication Equipment > 861799 Communication Equipment not elsewhere classified @ 100%|
|Deposited On:||27 Nov 2009 09:50|
|Last Modified:||12 Feb 2011 02:40|
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