Visualization of electron transport coefficients in RF electric and magnetic fields crossed at arbitrary angles

Abstract

The Boltzmann equation for charged particle swarms in gases subject to arbitrarily oriented spatially homogeneous and time-dependent electric and magnetic fields is solved by a recently developed multiterm theory, and attention is focused on the portrayal of the electron transport properties. Temporal variations of the electron transport data are presented for the Reid ramp model gas in varying configurations of electric and magnetic fields for a fixed field frequency and amplitudes of the electric and magnetic fields.