Current developments in contactless measurements of high quality materials for microelectronics and nanotechnology employing dielectric resonator techniques
Krupka, Jerzy, and Mazierska, Janina (2011) Current developments in contactless measurements of high quality materials for microelectronics and nanotechnology employing dielectric resonator techniques. Proceedings of the 2011 IEEE Region 10 Conference. TENCON 2011: 2011 IEEE Region 10 Conference , 22-24 November 2011, Bali, Indonesia , pp. 1126-1130.
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DOI: 10.1109/TENCON.2011.6129207
View at Publisher Website: http://www.tencon2011.org
Abstract
Progress in Microelectronics and Nanotechnology is determined by advancement in developing and characterization of novel materials. In this paper recent developments in nondestructive measurements of high quality semiconductors, conducting polymers, graphene and metamaterials are presented.
| ID Code: | 19631 |
|---|---|
| Item Type: | Conference Item (Refereed Research Paper - E1) |
| Related URLs: | |
| Keywords: | superconductors, microwave measurements, dielectric resonators, resistivity mapping, semiconductors, graphene, metamaterials, graphen, sheet resistance, conductivity |
| ISBN: | 978-1-4577-0256-3 |
| FoR Codes: | 09 ENGINEERING > 0906 Electrical and Electronic Engineering > 090699 Electrical and Electronic Engineering not elsewhere classified @ 70% 09 ENGINEERING > 0912 Materials Engineering > 091299 Materials Engineering not elsewhere classified @ 30% |
| SEO Codes: | 86 MANUFACTURING > 8615 Instrumentation > 861503 Scientific Instruments @ 100% |
| Deposited On: | 22 Feb 2012 12:05 |
| Last Modified: | 22 Apr 2013 09:04 |
| Downloads: | Total: 6 Last 12 Months: 0 |
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